A conversation about shaping the future of the digital age often triggers the buzzword Moore’s Law. Being a mere observation/prediction tool at first, Moore’s Law has evolved to be a pace keeper synchronizing a 500-billion-dollar industry for more than five decades. An industry where hardware advancements drive software developments and vice versa. In this talk, we present an outlook of the journey chip manufacturing is going to take in the 2030s. We shape this journey by delivering leading edge optical systems for lithography and mask manufacturing. Our evolutions in design and technology pushed the final frontier of what is possible (a.k.a. the „end of Moore“) further out by enabling beneficial die shrinks.